How to add HZO as an Oxide gate in Silvaco TCAD?

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  • #1
mhr0003
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TL;DR Summary
Help me add hafnium zirconium oxide in Silvaco
I am trying to simulate a Gate-All-Around FET in Silvaco TCAD for my thesis but I can't figure out how to add HZO (Hf0.5Zr0.5O2). I would really appreciate it if anyone could help me with the code for HZO or help me in any other way.
Thank you.
 
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  • #2
Here are some examples from Silvaco:
 

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