Photon emission

Time-resolved photon emission (TRPE) is used to measure timing waveforms on semiconductor devices. TRPE measurements are performed on the back side of the semiconductor device. The substrate of the device-under-test (DUT) must first be thinned mechanically. The device is mounted on a movable X-Y stage in an enclosure which shields it from all sources of light. The DUT is connected to an active electrical stimulus. The stimulus pattern is continuously looped and a trigger signal is sent to the TRPE instrument in order to tell it when the pattern repeats. A TRPE prober operates in a manner similar to a sampling oscilloscope, and is used to perform semiconductor failure analysis.

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