Lithography Definition and 13 Threads

I want to know what are the exposure methods that are used in photolithography? I've heard there are three, but not sure about them .. Thanks

Hi, Is there anybody who knows about this subject and can guide kindly? Regards, In electron beam lithography, there is an optimum aperture angle to obtain a minimum beam size: a) Determine this angle considering only the influence of the source and spherical aberrations. b) What is the...

In a lithography process I have a hard mask which is opaque. I have to make a wafer alignment, however I use optical techniques to align my wafer (lasers etc.) . How can I align my wafer through an opaque layer?

In this video, CAL is shown printing the Thinker in minutes all at once: not layer by layer as is done with many of today's 3D printers.

Hi friends, I need to identify the e beam resist and developer on a sample. Does anyone know whether ZEP-520A is only manufactured by ZEON? Or in general, is any e beam resist type (e.g. PMMA, ZEP520) the product of one company? And, is there somewhere a list of materials used as ebeam...

Does anybody know where to find schematics of the interior of modern processors for lithography? Not brand new, as far back as 32nm nodes? Or where to begin with this search? Thank

I have been trying to plate Copper on Copper sputtered Electronic grade Silicon Substrate which has been patterned and developed using UV photolithography. The patterns measure about 50-100microns in width and are about 1600microns long. I have tried plating 10micrometer thick Cu using a stock...

Hello, I have a silicon wafer with a 50nm layer of copper sputtered on it. I coated it with a 1µm of positive photo resist and patterned it with a UV laser stepper. Then I developed it and washed it thoroughly. The pattern has a surface area which measures appx 1300µm x 8µm. What I want to do...

Could a polymer that acts like a photoresist (either positive or negative) also be a thermoplastic. Do you have any ideas on what polymer/mechanisms could be used to achieve this?

Hello all, Can somebody explain to me what PEC (proximity effect control) means in nanofabrication? Thanks :)

researching "lithography" I've been researching "lithography" and have been looking for some info on the evolution of various techniques that have improved this process over the last 20 years. Anybody have some knowledge on this? (In relation to Moore's laws).

Hello semiconductor technologists! I'm thinking at a source of extreme UV for semiconductor lithography, so what would be your wishes, as compared to the first figures that emerge from my rantings? I take 30nm wavelength. Would less be better? I fear fluorescence hampers lithography...

I was curious as to how semiconductor manufacturing gets around the fact that diffraction should prevent processors with transistors on the scale of tens of nanometers from being possible. How do we get around this if the diffraction of light is a fundamental limit to how small we can do any...