- #1
mocaliber
- 2
- 0
Hi,
Though this may be a basic technique, I would like to know how to make a free standing structure.
Most of the papers use KOH as etchant to etch SiO2 and then get such structure.
And I think besides putting SiO2 into the etchant, there should be some other things work with this fabrication. Coating the photo resist? I am not sure..
So, it would be a great help if anyone can help me solve this stupid question.
Thank you!
Though this may be a basic technique, I would like to know how to make a free standing structure.
Most of the papers use KOH as etchant to etch SiO2 and then get such structure.
And I think besides putting SiO2 into the etchant, there should be some other things work with this fabrication. Coating the photo resist? I am not sure..
So, it would be a great help if anyone can help me solve this stupid question.
Thank you!