How to add HZO as an Oxide gate in Silvaco TCAD?

AI Thread Summary
To simulate a Gate-All-Around FET in Silvaco TCAD using HZO (Hf0.5Zr0.5O2) as an oxide gate, specific coding guidance is needed. Users are seeking assistance with the appropriate code to incorporate HZO into their simulations. Examples from Silvaco may provide insights but do not directly address the HZO integration. The discussion emphasizes the need for clear instructions or code snippets to facilitate this process. Assistance from experienced users in the community is crucial for successful simulation setup.
mhr0003
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TL;DR Summary
Help me add hafnium zirconium oxide in Silvaco
I am trying to simulate a Gate-All-Around FET in Silvaco TCAD for my thesis but I can't figure out how to add HZO (Hf0.5Zr0.5O2). I would really appreciate it if anyone could help me with the code for HZO or help me in any other way.
Thank you.
 
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