- #1
magfluxfield
- 5
- 0
Hi There,
Im doing a study of MOS capacitors (Semiconductor is 4H-SiC) and I am looking at the interface trap density with respect to temperature (range 300K to around 600K) and also photonic excitation with hv<Eg.
That said, i have a question regarding the temperature dependence on electron affinity, to calculate the flatband voltage shift due to the workfunction difference between the metal and the semiconductor (this does not take into account oxide fixed charges or interface traps) we can use;
[tex]\phi_{ms}=\phi_{m}-\phi_{s}=\phi_{m}-\left(\chi+\frac{E_{g}}{2}-\psi_{B}\right)[/tex]
where
[tex]\psi_{B}=E_{F}-E_{i}=kT\exp\left(\frac{N_{D}}{n_{i}}\right)[/tex]
and obviously the intrinsic carrier concentration has a temperature dependance, and also the components of that determining equation also have temperature depandance;
[tex] n_{i}=\sqrt{n_{c}n_{v}}\exp\left(\frac{-E_{g}}{2kT}\right) [/tex]
For 4H-SiC
[tex] E_{g}(T)=E_{g}(0)+6.5\times10^{-4}\frac{T^{2}}{T+1300} [/tex]
[tex] n_{c}=3.25\times10^{15}T^{\frac{3}{2}} [/tex]
[tex] n_{c}=4.8\times10^{15}T^{\frac{3}{2}} [/tex]
so we can now use these to calculate [tex] E_{F}-E_{i}=\psi_{B} [/tex] for various temperatures, which means the [tex] \frac{E_{g}}{2}-\psi_{B} [/tex] part is sorted.
However, my question is, the electron affinity must change due to band gap variations with temperature, how can these values for electron affinity be calculated to get a more accurate value for the metal-semiconductor work function difference as this determines the voltage shift in the C-V curve, which is then used to determine the interface trap density.
Any help would be appreciated.
Thanks,
Chris
Im doing a study of MOS capacitors (Semiconductor is 4H-SiC) and I am looking at the interface trap density with respect to temperature (range 300K to around 600K) and also photonic excitation with hv<Eg.
That said, i have a question regarding the temperature dependence on electron affinity, to calculate the flatband voltage shift due to the workfunction difference between the metal and the semiconductor (this does not take into account oxide fixed charges or interface traps) we can use;
[tex]\phi_{ms}=\phi_{m}-\phi_{s}=\phi_{m}-\left(\chi+\frac{E_{g}}{2}-\psi_{B}\right)[/tex]
where
[tex]\psi_{B}=E_{F}-E_{i}=kT\exp\left(\frac{N_{D}}{n_{i}}\right)[/tex]
and obviously the intrinsic carrier concentration has a temperature dependance, and also the components of that determining equation also have temperature depandance;
[tex] n_{i}=\sqrt{n_{c}n_{v}}\exp\left(\frac{-E_{g}}{2kT}\right) [/tex]
For 4H-SiC
[tex] E_{g}(T)=E_{g}(0)+6.5\times10^{-4}\frac{T^{2}}{T+1300} [/tex]
[tex] n_{c}=3.25\times10^{15}T^{\frac{3}{2}} [/tex]
[tex] n_{c}=4.8\times10^{15}T^{\frac{3}{2}} [/tex]
so we can now use these to calculate [tex] E_{F}-E_{i}=\psi_{B} [/tex] for various temperatures, which means the [tex] \frac{E_{g}}{2}-\psi_{B} [/tex] part is sorted.
However, my question is, the electron affinity must change due to band gap variations with temperature, how can these values for electron affinity be calculated to get a more accurate value for the metal-semiconductor work function difference as this determines the voltage shift in the C-V curve, which is then used to determine the interface trap density.
Any help would be appreciated.
Thanks,
Chris