Ravian said:say Al is evaporated in a vacuum chamber to form a thin film of AlN, say flow rate of N2 is 5sccm and deposition rate is 1 angstrom/s. then in 10minutes how thick film of AlN is formed? does in this case we need to consider voltage and current values (used to evaporate Al) also in order to estimate film thickness?
Dr Lots-o'watts said:... and the shape of the plasma, and the shape and size of the chamber, and possibly many other things. Have fun.
Q_Goest said:The term "standard" refers to standard conditions, usually 68 F and 14.7 psia (in the US). You'll find however, that different industries take liberties in defining standard conditions. I believe there are European industries that define standard conditions as 0 C (not sure the pressure they use). You should ask whoever gave you the values to define standard conditions for you if you need something any more accurate than that.
Wikipedia said:The current version of IUPAC's standard is a temperature of 0 °C (273.15 K, 32 °F) and an absolute pressure of 100 kPa (14.504 psi, 0.986 atm)[1], while NIST's version is a temperature of 20 °C (293.15 K, 68 °F) and an absolute pressure of 101.325 kPa (14.696 psi, 1 atm).
A standard cubic meter per minute (SCFM) is a unit of measurement used to describe the flow rate of a gas at standard temperature and pressure (STP) conditions. It is equivalent to 1 cubic meter of gas per minute at a temperature of 0 degrees Celsius and a pressure of 1 atmosphere.
SCFM differs from other flow rate measurements, such as cubic feet per minute (CFM), in that it takes into account the standard temperature and pressure conditions. This allows for more accurate and consistent comparisons of gas flow rates.
SCFM is commonly used in HVAC systems, compressed air systems, and gas flow measurement in industrial processes. It is also used in the measurement of gas flow rates in medical devices and laboratory equipment.
SCFM is calculated by multiplying the volumetric flow rate (in cubic feet per minute) by a correction factor that accounts for the difference between actual conditions and standard conditions. The correction factor is typically determined by using the ideal gas law.
Yes, SCFM can be converted to other flow rate units such as CFM or liters per minute (LPM) by using conversion factors specific to the desired unit of measurement. These conversion factors take into account the difference in standard temperature and pressure conditions between SCFM and the other units.